@phdthesis{oai:akita-pu.repo.nii.ac.jp:00000034, author = {曹, 建国 and Cao, Jianguo}, month = {2014-09-30, 2014-09-30}, note = {平成26年度}, school = {秋田県立大学}, title = {Ultra-fine internal grinding of SiC ceramics with the assistance of ultrasonic vibration (超音波を援用したSiCセラミックス内面の超精密加工の研究)}, year = {}, yomi = {ソウ, ケンコク} }